Axcelis Technologies, Inc. announced multiple shipments of the Company's Purion M? SiC medium current implanter to several leading power device chipmakers located in China. The systems, which shipped in the first quarter, will be used for 150mm production of silicon carbide power devices supporting automotive, industrial, energy, and other power intensive applications.
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- Axcelis Technologies, Inc. Announces Multiple Shipments of 150mm 'Purion M SiC Power Series' Implanters to Leading Power Device Manufacturers in China