Lam Research : New Nanotechnology Data Have Been Reported by A.P. Lane and Co-Authors (Directed Self-Assembly and Pattern Transfer of Five Nanometer Block Copolymer...
New Nanotechnology Data Have Been Reported by
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Our news editors obtained a quote from the research, "Reactive ion etching was used to selectively remove the PVBD block, and fingerprint patterns were subsequently transferred into an underlying chromium hard mask and carbon layer. DSA of the block copolymer (BCP) features resulted from orienting PVBD-b-PDSS on guidelines patterned by nanoimprint lithography. A density multiplication factor of 4? was achieved through a hybrid chemo-/grapho-epitaxy process. Cross-sectional scanning tunneling electron microscopy/electron energy loss spectroscopy (STEM/EELS) was used to analyze the BCP profile in the DSA samples."
According to the news editors, the research concluded: "Wetting layers of parallel orientation were observed to form unless the bottom and top surface were neutralized with a surface treatment and top coat, respectively."
For more information on this research see: Directed Self-Assembly and Pattern Transfer of Five Nanometer Block Copolymer Lamellae. Acs Nano, 2017;():. (
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