CyberOptics Corporation will exhibit at SEMICON West 2022 HYBRID, scheduled to take place July 12–14, 2022 at the Moscone Center in San Francisco and online 24/7. The company will launch its next-generation WaferSense® Auto Teaching System™ (ATS2) and new ReticleSense® Auto Teaching System™ (ATSR) in Booth #1241. ATS2 and ATSR are multi camera sensors used with CyberSpectrum™ software to teach accurate wafer and reticle hand-off calibration for proper alignment and set-up of semiconductor tools. The sensors "see" inside to capture three dimensional off-set data (x, y and z) in real-time to quickly teach wafer and reticle transfer positions - all without opening the tools.

Process and equipment engineers can conduct repeatable and reproducible setups and maintenance checks, speed trouble-shooting and eliminate technician-to-technician variation. CyberOptics also will demonstrate WaferSense® sensors for leveling, vibration, gapping, relative humidity, resistance and airborne particles.